Praktikum Elektronenstrahllithographie (ESL)
Electron-beam lithography - Wikipedia
Dose influence on the PMMA e-resist for the development of high-aspect ratio and reproducible sub-micrometric structures by elec
Electron-beam lithography for polymer bioMEMS with submicron features | Microsystems & Nanoengineering
E-beam resists ‒ Associated campuses ‐ EPFL
Lithography
Proximity Correction
Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers - ScienceDirect
Electron-Beam Lithography Training
Nanofabrication by electron beam lithography and its applications: A review - ScienceDirect
Electron beam lithography in thick negative tone chemically amplified resist: Controlling sidewall profile in deep trenches and channels - ScienceDirect
Direct laser writing lithography using a negative-tone electron-beam resist
Cr pattern created by electron beam lithography with PMMA resist... | Download Scientific Diagram
nanoHUB.org - Resources: ECE 695Q Lecture 21: E-Beam Lithography Process: Watch Presentation
Combinatorial Optimization of a Molecular Glass Photoresist System for Electron Beam Lithography - Bauer - 2011 - Advanced Materials - Wiley Online Library
3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology
Proximity Correction
Nanolithography / Electron Beam Lithography
Micromachines | Free Full-Text | Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate
Electron-Beam Lithography Training
![PDF] ELECTRON BEAM LITHOGRAPHY METHOD FOR HIGH-RESOLUTION NANOFABRICATION | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/f9013876b268eea107b68938c97fcee62fd8e60e/1-Figure2-1.png "PDF] ELECTRON BEAM LITHOGRAPHY METHOD FOR HIGH-RESOLUTION NANOFABRICATION | Semantic Scholar")
PDF] ELECTRON BEAM LITHOGRAPHY METHOD FOR HIGH-RESOLUTION NANOFABRICATION | Semantic Scholar
Independent-Exposure Method in Electron-Beam Lithography | IntechOpen
